Application of focused ion beam for machining of nanopillar sheet
This report introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angl...
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| Format: | Monograph |
| Language: | English |
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2011
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| Online Access: | http://irep.iium.edu.my/28921/1/095_EDW_B0803-99_2011_Full_Version_of_Research_Report.pdf http://irep.iium.edu.my/28921/ |
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| Summary: | This report introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angle (θ), aspect ratio (ar) and average surface roughness (Ra). Statistical models of output responses were developed using Taguchi method of design of experiment. Signal to noise ratio were calculated and analyzed for all of the responses. Developed models were used for multiple response optimizations by desirability function approach to obtain minimum θ, Ra and maximum ar. The optimized values were obtained and verified experimentally. The optimized values of θ, ar were 7.5° and 1.7 respectively which were obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 5 μm. Besides, the optimized values of Ra were 13.7 nm was obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 0.6μm. By using these process parameters, microfeatures for Bio-MEMS were fabricated |
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