Fabrication of micromold cavity for microreplication: A review
In this paper, various fabrication techniques for micromold cavity are reviewed and discussed. Silicon and lithography based fabrication were being used for years for the fabrication of micromold cavity. In the later stage direct fabrication techniques such as focused ion beam, micro electro disc...
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| Main Authors: | , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27157/1/048_ICME_2008_JB_MFG_ID-0127.pdf http://irep.iium.edu.my/27157/ |
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| Summary: | In this paper, various fabrication techniques for micromold cavity are reviewed and
discussed. Silicon and lithography based fabrication were being used for years for the
fabrication of micromold cavity. In the later stage direct fabrication techniques such as
focused ion beam, micro electro discharge machining, laser micromachining, tool based
micromilling, etc., become cost effective and popular. These micromold cavities were used
for mass production of microcomponents. The fabrication processes, advantages and
disadvantages of these processes are discussed in this paper. The processes are also compared
for the ease of process selection for a particular fabrication. |
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