Geometrical integrity of micromold cavity sputtered by FIB using multilayer slicing approach
This paper discusses the investigation of geometrical integrity of micromold cavity produced by focused ion beam (FIB) sputtering slice by slice. Parabolic shaped micromold cavity was chosen as an example. Preliminary experiments were carried out to characterize the machine and select the optim...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer Berlin / Heidelberg
2007
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27097/1/016_MST_13%281%29_2007_103-107.pdf http://irep.iium.edu.my/27097/ http://link.springer.com/article/10.1007/s00542-006-0254-4 |
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