Development of a micromolding process

• Main Authors: Hung, N. P., Yuan, S., Lee, E. C. W., Ali, Mohammad Yeakub
• Format: Conference or Workshop Item
• Language: English
• Published: 2001
• Subjects: TS Manufactures
• Online Access: http://irep.iium.edu.my/27139/1/035_DTIP-SPIE_France_2001_317-328_Hung.pdf; http://irep.iium.edu.my/27139/

This paper presents the simulating and experimental results of a micromolding process for fabrication of threedimensional (3D) microcomponents. The maskless process utilizes a micro electrical discharging system for bulk machining, then finish machining using focused-ion beam to sputter the mold m...