Fabrication of silicon nanopillar sheet for Cell Culture Dish

• Main Authors: Ali, Mohammad Yeakub, Mohd Fuad, Nurul Hajar
• Format: Article
• Language: English
• Published: Trans Tech Publications, Switzerland 2011
• Subjects: TJ Mechanical engineering and machinery; TS Manufactures
• Online Access: http://irep.iium.edu.my/2281/1/AMR_2011_Vol_264-265__1352-1356.pdf; http://irep.iium.edu.my/2281/; http://www.scientific.net

This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopilla...