Influences of additives on copper film quality and gap filling capability of plating process

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Bibliographic Details
Main Authors: Mridha, Shahjahan, Law, Shao Beng
Format: Book Chapter
Language:English
Published: IIUM Press 2011
Subjects:
Online Access:http://irep.iium.edu.my/19353/1/chp6.pdf
http://irep.iium.edu.my/19353/
http://rms.research.iium.edu.my/bookstore/default.aspx
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