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Electrical property of ITO thin film deposited by Rf Magnetron Sputtering

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Main Authors: Sutjipto, Agus Geter Edy, Mohd Fuad, Nurul Hajar, -, Farah Diana
Format: Book Chapter
Language:English
Published: IIUM Press 2011
Subjects:
TP Chemical technology
Online Access:http://irep.iium.edu.my/19092/4/Chapter_9.pdf
http://irep.iium.edu.my/19092/
http://rms.research.iium.edu.my/bookstore/default.aspx
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spelling my.iium.irep.190922012-11-06T13:38:08Z http://irep.iium.edu.my/19092/ Electrical property of ITO thin film deposited by Rf Magnetron Sputtering Sutjipto, Agus Geter Edy Mohd Fuad, Nurul Hajar -, Farah Diana TP Chemical technology IIUM Press 2011 Book Chapter REM application/pdf en http://irep.iium.edu.my/19092/4/Chapter_9.pdf Sutjipto, Agus Geter Edy and Mohd Fuad, Nurul Hajar and -, Farah Diana (2011) Electrical property of ITO thin film deposited by Rf Magnetron Sputtering. In: Advances in materials engineering - volume 2. IIUM Press, Kuala Lumpur, pp. 49-54. ISBN 9789674181680 http://rms.research.iium.edu.my/bookstore/default.aspx
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic TP Chemical technology
spellingShingle TP Chemical technology
Sutjipto, Agus Geter Edy
Mohd Fuad, Nurul Hajar
-, Farah Diana
Electrical property of ITO thin film deposited by Rf Magnetron Sputtering
format Book Chapter
author Sutjipto, Agus Geter Edy
Mohd Fuad, Nurul Hajar
-, Farah Diana
author_facet Sutjipto, Agus Geter Edy
Mohd Fuad, Nurul Hajar
-, Farah Diana
author_sort Sutjipto, Agus Geter Edy
title Electrical property of ITO thin film deposited by Rf Magnetron Sputtering
title_short Electrical property of ITO thin film deposited by Rf Magnetron Sputtering
title_full Electrical property of ITO thin film deposited by Rf Magnetron Sputtering
title_fullStr Electrical property of ITO thin film deposited by Rf Magnetron Sputtering
title_full_unstemmed Electrical property of ITO thin film deposited by Rf Magnetron Sputtering
title_sort electrical property of ito thin film deposited by rf magnetron sputtering
publisher IIUM Press
publishDate 2011
url http://irep.iium.edu.my/19092/4/Chapter_9.pdf
http://irep.iium.edu.my/19092/
http://rms.research.iium.edu.my/bookstore/default.aspx
_version_ 1643607592130314240
score 13.160551

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