Process Development and Optimization of Carbon-Based Thin Film Deposition through Ablation of Graphite
This paper reports the deposition of carbon nanomaterials on silicon substrate using a dense plasma focus device. The film property is studied using a field emission scanning electron microscopy (FESEM) and energy dispersive X-ray (EDX). The first test was deposited using 1, 3, 5, and 7 focus shots...
Saved in:
Main Authors: | , , , |
---|---|
Format: | Article |
Published: |
Trans Tech Publications
2016
|
Subjects: | |
Online Access: | http://eprints.intimal.edu.my/980/ https://www.scientific.net/KEM.701.42 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!