Process Development and Optimization of Carbon-Based Thin Film Deposition through Ablation of Graphite

• Main Authors: Low, Andrew Chun Wey, Damideh, Vahid*, Saw, S. H., Lim, Chin Seong*
• Format: Article
• Published: Trans Tech Publications 2016
• Subjects: QC Physics
• Online Access: http://eprints.intimal.edu.my/980/; https://www.scientific.net/KEM.701.42

This paper reports the deposition of carbon nanomaterials on silicon substrate using a dense plasma focus device. The film property is studied using a field emission scanning electron microscopy (FESEM) and energy dispersive X-ray (EDX). The first test was deposited using 1, 3, 5, and 7 focus shots...