Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching
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2012
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| Online Access: | http://eprints.utp.edu.my/9070/ |
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my.utp.eprints.90702013-04-07T03:12:52Z Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching Saeid Kakooei, 2012 Citation Index Journal NonPeerReviewed Saeid Kakooei, (2012) Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching. [Citation Index Journal] http://eprints.utp.edu.my/9070/ |
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Asia |
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Malaysia |
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Universiti Teknologi Petronas |
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http://eprints.utp.edu.my/ |
| format |
Citation Index Journal |
| author |
Saeid Kakooei, |
| spellingShingle |
Saeid Kakooei, Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching |
| author_facet |
Saeid Kakooei, |
| author_sort |
Saeid Kakooei, |
| title |
Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching
|
| title_short |
Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching
|
| title_full |
Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching
|
| title_fullStr |
Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching
|
| title_full_unstemmed |
Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching
|
| title_sort |
controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic tmah wet etching |
| publishDate |
2012 |
| url |
http://eprints.utp.edu.my/9070/ |
| _version_ |
1738655701152038912 |
| score |
13.160551 |