Process Modeling, Optimization and Characterization of Silicon <100> Optical Waveguides by Anisotropic Wet Etching

• Main Authors: Haroon, Hazura, Hanim, Abdul Razak, Mardiana, Bidin, Sahbudin, Saari, Menon, P.S
• Format: Article
• Language: English
• Published: Trans Tech Publications 2012
• Subjects: TA Engineering (General). Civil engineering (General)
• Online Access: http://eprints.utem.edu.my/id/eprint/13076/1/icmens_ura.pdf; http://eprints.utem.edu.my/id/eprint/13076/

We present a detailed fabrication process of silicon optical waveguide with a depth of 4μm via simulation and experiment. An anisotropic wet etching using Potassium Hydroxide (KOH) solutions was selected to study the influence of major fabrication parameters such as etch rate, oxidation time and...