Modeling and Microfabrication of a CMOS Resonator for Magnetic Field Measurement
This paper presents the modeling and microfabrication of a CMOS resonant magnetic field sensor capable of measuring magnetic field in the range of nanotesla. This sensor is based on differential electrostatic along with Lorentz force actuation and piezoresistive sensing. Cadence virtuoso layout...
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Main Authors: | , , , |
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Format: | Conference or Workshop Item |
Published: |
2012
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Subjects: | |
Online Access: | http://ieeexplore.ieee.org http://eprints.utp.edu.my/8798/ |
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