Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields
In this paper, we present an analytical model of novel plus shape MEMS paddle bridge resonant sensor to estimate electromechanical behavior, damping, electrostatic actuation and capacitive detection. The analytical model is derived using the Reynold's method for squeeze film and Rayleigh meth...
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my.utp.eprints.71722017-01-19T08:22:11Z Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields Ahmad,, Farooq Md Khir, Mohd Haris Hamid, Nor Hisham Dennis, John Ojur TK Electrical engineering. Electronics Nuclear engineering In this paper, we present an analytical model of novel plus shape MEMS paddle bridge resonant sensor to estimate electromechanical behavior, damping, electrostatic actuation and capacitive detection. The analytical model is derived using the Reynold's method for squeeze film and Rayleigh method for resonant frequency. Working in a resonant condition, the sensor’s vibration amplitude is converted into the sensing current, which reflects the outside magnetic field. The first bending mode resonant frequency of optimized device is estimated at different values of damping ratios. The analytical results of the device are verified with the simulation. The results indicate its sensitivity 0.3163 pA/μT, when operating at optimized damping ratio 0.056 and 26.58% improvement in capacitive sensitivity with respect to ordinary paddle bridge. Our analytical model can be useful in the mechanical design of different shapes of paddle bridge resonators with complex structural configurations. IEEE 2011-12-01 Article NonPeerReviewed application/pdf http://eprints.utp.edu.my/7172/1/stamp.jsp%3Ftp%3D%26arnumber%3D6088350%26tag%3D1 http://ieeexplore.ieee.org Ahmad,, Farooq and Md Khir, Mohd Haris and Hamid, Nor Hisham and Dennis, John Ojur (2011) Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields. IEEE Xplore, 10.1109/RSM.2011.6088350 (10.1109/RSM.2011.6088350 ). 310 -314 . ISSN 978-1-61284-844-0 http://eprints.utp.edu.my/7172/ |
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TK Electrical engineering. Electronics Nuclear engineering Ahmad,, Farooq Md Khir, Mohd Haris Hamid, Nor Hisham Dennis, John Ojur Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields |
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In this paper, we present an analytical model of novel
plus shape MEMS paddle bridge resonant sensor to estimate
electromechanical behavior, damping, electrostatic actuation and capacitive detection. The analytical model is derived using the Reynold's method for squeeze film and Rayleigh method for resonant frequency. Working in a resonant condition, the sensor’s vibration amplitude is converted into the sensing current, which reflects the outside magnetic field. The first bending mode resonant frequency of optimized device is estimated at different
values of damping ratios. The analytical results of the device are verified with the simulation. The results indicate its sensitivity 0.3163 pA/μT, when operating at optimized damping ratio 0.056 and 26.58% improvement in capacitive sensitivity with respect to ordinary paddle bridge. Our analytical model can be useful in the
mechanical design of different shapes of paddle bridge resonators with complex structural configurations. |
format |
Article |
author |
Ahmad,, Farooq Md Khir, Mohd Haris Hamid, Nor Hisham Dennis, John Ojur |
author_facet |
Ahmad,, Farooq Md Khir, Mohd Haris Hamid, Nor Hisham Dennis, John Ojur |
author_sort |
Ahmad,, Farooq |
title |
Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields |
title_short |
Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields |
title_full |
Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields |
title_fullStr |
Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields |
title_full_unstemmed |
Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields |
title_sort |
analytical modeling of plus shape mems paddle bridge resonant sensor for weak magnetic fields |
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IEEE |
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2011 |
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http://eprints.utp.edu.my/7172/1/stamp.jsp%3Ftp%3D%26arnumber%3D6088350%26tag%3D1 http://ieeexplore.ieee.org http://eprints.utp.edu.my/7172/ |
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1738655551758270464 |
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13.160551 |