Design and simulation of AIN-Based FBAR Resonator for Hydrogen sulfide Gas detection.

• Main Authors: Ba Hashwan, S.S., Md Khir, M.H., Al-Douri, Y., Algamili, A.S., Alabsi, S.S.
• Format: Conference or Workshop Item
• Published: Institute of Electrical and Electronics Engineers Inc. 2021
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85124033729&doi=10.1109%2fSENNANO51750.2021.9642668&partnerID=40&md5=3ca58394eade8e6c9847c306a4ac4b0f; http://eprints.utp.edu.my/29230/

The mathematical modeling, design, and simulation of the film bulk acoustic resonator (FBAR) sensor based on Aluminum nitride (AIN) thin film for hydrogen sulfide gas detection are presented in this paper. The FBAR sensor is designed according PiezoMUMPs fabrication technology. The mathematical mode...