Optical and capacitive characterization of MEMS magnetic resonator
In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz for...
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| Main Authors: | , , , , , |
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| Format: | Article |
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Institute of Electronics Information Communication Engineers
2016
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84989179721&doi=10.1587%2felex.13.20160773&partnerID=40&md5=85ba6e6e2f9a082b5129f8caa39d3d51 http://eprints.utp.edu.my/25883/ |
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| Summary: | In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz force generates lateral displacements at low driving voltages which are proportional to the magnetic field and the input current. A displacement of more than 9.8 μm was achieved with a magnetic field of 0.12 T and a driving current of 27 mA. Magnetic sensitivity of 1.41 V/Tin air was experimentally measured using permanent magnets and capacitive sensing circuitry. Optical results demonstrate the sensitivity values between 0.090 μm/mT and 0.074 μm m/mT. © IEICE 2016. |
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