FEM analysis of sezawa mode SAW sensor for VOC based on CMOS compatible AlN/SiO2/Si multilayer structure
A Finite Element Method (FEM) simulation study is conducted, aiming to scrutinize the sensitivity of Sezawa wave mode in a multilayer AlN/SiO2 /Si Surface Acoustic Wave (SAW) sensor to low concentrations of Volatile Organic Compounds (VOCs), that is, trichloromethane, trichloroethylene, carbon tetra...
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| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
MDPI AG
2018
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047608741&doi=10.3390%2fs18061687&partnerID=40&md5=9027fd29a23bf9b19034e20369fa2fe2 http://eprints.utp.edu.my/20870/ |
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