Effect of high-temperature annealing heat treatment to microstructure of aluminium nitride on sapphire substrate

• Main Authors: Tanasta, Z., Muhamad, P., Kuwano, N., Unuh, M. H., Amran, M. H.
• Format: Article
• Published: Penerbit Akademia Baru 2019
• Subjects: T Technology (General)
• Online Access: http://eprints.utm.my/id/eprint/88788/; https://www-scopus-com.ezproxy.utm.my/record/display.uri?eid=2-s2.0-85065467880&origin=resultslist&sort=plf-f&src=s&st1=

Aluminium Nitride (AIN) is classified in the 3rd nitride ceramic materials and able to emit the lights at shorter wavelength of 210 nm with high band gap up to 6 eV. In addition, with thermal conductivity up to 140 W/mK has made this material in demand for electronic devices applications such as lig...