Reduction of defects on microstructure aluminium nitride using high temperature annealing heat treatment

• Main Authors: Tanasta, Z., Muhamad, Pauziah, Kuwano, Noriyuki, Mohd Yatim, Norfazrina Hayati, Unuh, Mohd Hishamuddin
• Format: Conference or Workshop Item
• Language: English; English
• Published: Institute of Physics Publishing 2018
• Subjects: TA Engineering (General). Civil engineering (General); TJ Mechanical engineering and machinery
• Online Access: http://irep.iium.edu.my/65199/1/65199_Reduction%20of%20Defects%20on%20Microstructure%20Aluminium_conference%20article.pdf; http://irep.iium.edu.my/65199/2/65199_Reduction%20of%20Defects%20on%20Microstructure%20Aluminium_scopus.pdf; http://irep.iium.edu.my/65199/; http://iopscience.iop.org/article/10.1088/1757-899X/328/1/012019/pdf

Aluminium Nitride (AlN) is a ceramic 111-nitride material that is used widely as components in functional devices. Besides good thermal conductivity, it also has a high band gap in emitting light which is 6 eV. AlN thin film is grown on the sapphire substrate (0001). However, lattice mismatch bet...