Electron microscopy determination of crystallographic polarity of aluminum nitride thin films

Aluminum nitride (AlN) crystallizes usually in the wurtzite structure (P6 3 mc) and it has a crystallographic polarity. In this work, the polarity in AlN was characterized by using several methods of transmission electron microscopy (TEM) in order to examine their applicability. AlN was deposited by...

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Bibliographic Details
Main Authors: Kuwano, Noriyuki, Kaur, Jesbains, Siti Rahmah, Siti Rahmah
Format: Article
Published: Elsevier Ltd. 2019
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Online Access:http://eprints.utm.my/id/eprint/87626/
http://dx.doi.org/10.1016/j.micron.2018.09.014
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