Diamond turning of soft semiconductors to obtain nanometric mirror surfaces
Diamond cutting is a viable alternative to grinding and polishing in the fabrication of high-quality soft semiconductors. Investigation of indentation provides useful information for understanding the practical diamond cutting process of brittle materials. Cutting forces and temperatures were analys...
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Main Authors: | Fang, Fengzhou Z., Venkatesh, Vasisht,C., Zhang, G.X. |
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Format: | Article |
Language: | English |
Published: |
Springer Verlag
2002
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Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/7388/1/VenkateshVC2003_DiamondTurningSoftSemiconductorObtain.pdf http://eprints.utm.my/id/eprint/7388/ http://dx.doi.org/10.1007/s001700200107 |
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