Diamond turning of soft semiconductors to obtain nanometric mirror surfaces

Diamond cutting is a viable alternative to grinding and polishing in the fabrication of high-quality soft semiconductors. Investigation of indentation provides useful information for understanding the practical diamond cutting process of brittle materials. Cutting forces and temperatures were analys...

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Bibliographic Details
Main Authors: Fang, Fengzhou Z., Venkatesh, Vasisht,C., Zhang, G.X.
Format: Article
Language:English
Published: Springer Verlag 2002
Subjects:
Online Access:http://eprints.utm.my/id/eprint/7388/1/VenkateshVC2003_DiamondTurningSoftSemiconductorObtain.pdf
http://eprints.utm.my/id/eprint/7388/
http://dx.doi.org/10.1007/s001700200107
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