A real time marking inspection scheme for semiconductor industries

• Main Authors: Nagarajan, R., Yaacob, Sazali, Pandian, P., Karthigayan, M., Amin, Shamsudin, Khalid, Marzuki
• Format: Article
• Language: English
• Published: Springer 2007
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.utm.my/id/eprint/7203/1/ShamsudinHjAmin2007_%20Arealtimemarkinginspectionscheme.pdf; http://eprints.utm.my/id/eprint/7203/; http://dx.doi.org/10.1007/s00170-006-0669-1

In this paper, a real time industrial machine vision system incorporating optical character recognition (OCR) is employed to inspect markings on integrated circuit (IC) chips. This inspection is carried out while the ICs are coming out from the manufacturing line. A TSSOP-DGG type of IC package from...