Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking

This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF. The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA. The SMA spiral coil forms an induct...

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Bibliographic Details
Main Authors: Mohamed Ali, Mohamed Sultan, Abuzaiter, Alaa, Schlosser, Colin, Bycraft, Brad, Takahata, Kenichi
Format: Article
Published: MDPI AG 2014
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Online Access:http://eprints.utm.my/id/eprint/63246/
http://dx.doi.org/10.3390/s140712399
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