Sensing properties of copper oxide thin film upon exposure of methane gas in air
Application of p-type semiconductor copper oxide thin films as methane gas sensors in air was investigated. A series of copper oxide thin film had been prepared. The thin films were fabricated by using direct current (DC) sputtering technique on corning glass substrates at different deposition time...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2014
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| Online Access: | http://eprints.utm.my/id/eprint/50754/25/ZainatulIzzahABGhani_MFS2014.pdf http://eprints.utm.my/id/eprint/50754/ http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:86935 |
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