Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response

• Main Authors: Ahmad Faizal, Mohd Zain, Jia, Wei Low, Nafarizal, Nayan, Mohd Zainizan, Sahdan, Mohd Khairul, Ahmad, Ali Yeon, Md Shakaff, Ammar, Zakaria
• Format: Conference or Workshop Item
• Language: English
• Published: 2014
• Subjects: TS Manufactures
• Online Access: http://umpir.ump.edu.my/id/eprint/7371/1/Correlation_between_the_microstructure_of_copper_oxide_thin_film_and_its_gas_sensing_response.pdf; http://umpir.ump.edu.my/id/eprint/7371/; http://dx.doi.org/10.1109/SMELEC.2014.6920788

Copper oxide gas sensor was prepared on silicon wafer by sputtering of copper target at different oxygen flow rate of 0, 4, 8 and 16 sccm using RF magnetron sputtering technique. Argon flow rate, RF power, working pressure and substrate bias voltage were fixed at 50 sccm, 400 W, 22.5 mTorr and −40 V...