Morphological study of RF magnetron sputtered silicon thin films on aisi 304 stainless steel

• Main Authors: Abdul Halim, Zulhelmi Alif, Akram, Ahmad, Mat Yajid, Muhamad Azizi
• 格式: Article
• 语言: English
• 出版: Penerbit UTM Press 2012
• 主题: TK Electrical engineering. Electronics Nuclear engineering
• 在线阅读: http://eprints.utm.my/id/eprint/47250/1/ZulhelmiAlifHalim2012_MorphologicalStudyofRFMagnetron.pdf; http://eprints.utm.my/id/eprint/47250/

Silicon thin films on AISI 304 stainless steel were deposited using RF magnetron sputtering. The effect of substrate temperature on the film properties were investigated as the films were prepared at different substrate temperature. Solid phase reaction between Si and Fe from the substr...