Morphological study of RF magnetron sputtered silicon thin films on aisi 304 stainless steel

• المؤلفون الرئيسيون: Abdul Halim, Zulhelmi Alif, Akram, Ahmad, Mat Yajid, Muhamad Azizi
• التنسيق: مقال
• اللغة: English
• منشور في: Penerbit UTM Press 2012
• الموضوعات: TK Electrical engineering. Electronics Nuclear engineering
• الوصول للمادة أونلاين: http://eprints.utm.my/id/eprint/47250/1/ZulhelmiAlifHalim2012_MorphologicalStudyofRFMagnetron.pdf; http://eprints.utm.my/id/eprint/47250/

Silicon thin films on AISI 304 stainless steel were deposited using RF magnetron sputtering. The effect of substrate temperature on the film properties were investigated as the films were prepared at different substrate temperature. Solid phase reaction between Si and Fe from the substr...