The future of non-planar nanoelectronics MOSFET devices: a review
This study was focused on the evaluation of present development of nanoelectronic devices and the projection of future devices, ultimately for non-planar geometry. The recent scaling of IC technology was limiting the employment of conventional, planar structure, thus implies in the wake of the resea...
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2010
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Online Access: | http://eprints.utm.my/id/eprint/26562/1/RazaliIsmail_TheFutureofNon-planarNanoelectronics.pdf http://eprints.utm.my/id/eprint/26562/ http://scialert.net/abstract/?doi=jas.2010.2136.2146 |
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my.utm.265622018-10-31T12:30:21Z http://eprints.utm.my/id/eprint/26562/ The future of non-planar nanoelectronics MOSFET devices: a review Riyadi, Munawar A. Suseno, Jatmiko E. Ismail, Razali TK Electrical engineering. Electronics Nuclear engineering This study was focused on the evaluation of present development of nanoelectronic devices and the projection of future devices, ultimately for non-planar geometry. The recent scaling of IC technology was limiting the employment of conventional, planar structure, thus implies in the wake of the research in non-classical architecture. The present status of extended planar silicon devices, including the insertion of high-k dielectric, metal gate and SOI MOSFET in the recent manufacturing process is elaborated. The alternative path in the enhancement of IC device performance, merely in the sub-50nm dimension is shown, with the role of double gate MOSFET and non-planar structure devices, including vertical FETs, is expected to take greater share, as well as several emerging nanostructures. The possibility to implement the non-planar devices generation heavily depends on the maturity of each technology and the ability to clear the obstacles in processing. Asian Network for Scientific Information 2010 Article PeerReviewed application/pdf en http://eprints.utm.my/id/eprint/26562/1/RazaliIsmail_TheFutureofNon-planarNanoelectronics.pdf Riyadi, Munawar A. and Suseno, Jatmiko E. and Ismail, Razali (2010) The future of non-planar nanoelectronics MOSFET devices: a review. Journal of Applied Sciences, 10 (18). 2136 -2146. ISSN 1812-5654 http://scialert.net/abstract/?doi=jas.2010.2136.2146 DOI:10.3923/jas.2010.2136.2146 |
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TK Electrical engineering. Electronics Nuclear engineering Riyadi, Munawar A. Suseno, Jatmiko E. Ismail, Razali The future of non-planar nanoelectronics MOSFET devices: a review |
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This study was focused on the evaluation of present development of nanoelectronic devices and the projection of future devices, ultimately for non-planar geometry. The recent scaling of IC technology was limiting the employment of conventional, planar structure, thus implies in the wake of the research in non-classical architecture. The present status of extended planar silicon devices, including the insertion of high-k dielectric, metal gate and SOI MOSFET in the recent manufacturing process is elaborated. The alternative path in the enhancement of IC device performance, merely in the sub-50nm dimension is shown, with the role of double gate MOSFET and non-planar structure devices, including vertical FETs, is expected to take greater share, as well as several emerging nanostructures. The possibility to implement the non-planar devices generation heavily depends on the maturity of each technology and the ability to clear the obstacles in processing. |
format |
Article |
author |
Riyadi, Munawar A. Suseno, Jatmiko E. Ismail, Razali |
author_facet |
Riyadi, Munawar A. Suseno, Jatmiko E. Ismail, Razali |
author_sort |
Riyadi, Munawar A. |
title |
The future of non-planar nanoelectronics MOSFET devices: a review |
title_short |
The future of non-planar nanoelectronics MOSFET devices: a review |
title_full |
The future of non-planar nanoelectronics MOSFET devices: a review |
title_fullStr |
The future of non-planar nanoelectronics MOSFET devices: a review |
title_full_unstemmed |
The future of non-planar nanoelectronics MOSFET devices: a review |
title_sort |
future of non-planar nanoelectronics mosfet devices: a review |
publisher |
Asian Network for Scientific Information |
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2010 |
url |
http://eprints.utm.my/id/eprint/26562/1/RazaliIsmail_TheFutureofNon-planarNanoelectronics.pdf http://eprints.utm.my/id/eprint/26562/ http://scialert.net/abstract/?doi=jas.2010.2136.2146 |
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13.222552 |