Effect of cathodic arc PVD parameters on roughness of TiN coating on steel substrate

• Main Authors: Ali, M., Hamzah, E., Qazi, I. A., Toff, M. R. M.
• Format: Article
• Published: 2010
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.utm.my/id/eprint/25117/; http://dx.doi.org/10.1016/j.cap.2009.07.007

Titanium nitride which is widely used as a hard coating material was coated on tool steel, by physical vapor deposition method. Surface roughness was investigated as a function of deposition rate, substrate bias and temperature, nitrogen flow rate and metal ion etching. The study showed that increas...