Formation of self-assembled Ge islands on Si (100) using magnetron sputtering and subsequent rapid thermal annealing

• Main Authors: Ameruddin, Amira Saryati, Othaman, Zulkafli, Aryanto, Didik, Ismail, Abd. Khamim
• Format: Conference or Workshop Item
• Published: 2009
• Subjects: Q Science (General)
• Online Access: http://eprints.utm.my/id/eprint/15208/

Formation of Ge island after an ex-situ thermal annealing of Ge-rich film on Si (100) were investigated. Ge film was deposited using radio-frequency magnetron sputtering with the substrate being at room temperature. The film was then thermal annealed at an elevated temperature using a rapid thermal...