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Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films

Hydrogenated amorphous carbon (a-C:H) thin films were prepared using a direct-current plasma enhanced chemical vapor deposition (DC-PECVD) over a various range of DC power (w) in range of 0.2989-0.4218 W. Changes in the film properties due to DC-power were systematically studied by Raman spectromete...

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Main Authors: A. B., Suriani, R., Rosazley, Sakrani, Samsudi, M. Rusop, Mohamad
Format: Book Section
Published: American Institute of Physics 2009
Subjects:
QC Physics
Online Access:http://eprints.utm.my/id/eprint/13083/
http://dx.doi.org/10.1063/1.3160181
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spelling my.utm.130832011-07-18T01:39:29Z http://eprints.utm.my/id/eprint/13083/ Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films A. B., Suriani R., Rosazley Sakrani, Samsudi M. Rusop, Mohamad QC Physics Hydrogenated amorphous carbon (a-C:H) thin films were prepared using a direct-current plasma enhanced chemical vapor deposition (DC-PECVD) over a various range of DC power (w) in range of 0.2989-0.4218 W. Changes in the film properties due to DC-power were systematically studied by Raman spectrometer and UV-Vis spectrophotometer. Based on the results, the films studied in the present research are found to consist of sp2 clusters of which their size increases with increasing power during the deposition, resulting in lower hydrogen, sp3 content and optical band gap. The experimental results revealed that a-C:H properties are highly dependent on DC-power. American Institute of Physics 2009 Book Section PeerReviewed A. B., Suriani and R., Rosazley and Sakrani, Samsudi and M. Rusop, Mohamad (2009) Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films. In: AIP Conference Proceedings. American Institute of Physics, USA, 443 -448. ISBN 978-073540673-5 http://dx.doi.org/10.1063/1.3160181 doi:10.1063/1.3160181
institution Universiti Teknologi Malaysia
building UTM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
url_provider http://eprints.utm.my/
topic QC Physics
spellingShingle QC Physics
A. B., Suriani
R., Rosazley
Sakrani, Samsudi
M. Rusop, Mohamad
Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films
description Hydrogenated amorphous carbon (a-C:H) thin films were prepared using a direct-current plasma enhanced chemical vapor deposition (DC-PECVD) over a various range of DC power (w) in range of 0.2989-0.4218 W. Changes in the film properties due to DC-power were systematically studied by Raman spectrometer and UV-Vis spectrophotometer. Based on the results, the films studied in the present research are found to consist of sp2 clusters of which their size increases with increasing power during the deposition, resulting in lower hydrogen, sp3 content and optical band gap. The experimental results revealed that a-C:H properties are highly dependent on DC-power.
format Book Section
author A. B., Suriani
R., Rosazley
Sakrani, Samsudi
M. Rusop, Mohamad
author_facet A. B., Suriani
R., Rosazley
Sakrani, Samsudi
M. Rusop, Mohamad
author_sort A. B., Suriani
title Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films
title_short Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films
title_full Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films
title_fullStr Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films
title_full_unstemmed Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films
title_sort raman and uv-visible spectrophotometer studies of hydrogenated amorphous carbon thin films
publisher American Institute of Physics
publishDate 2009
url http://eprints.utm.my/id/eprint/13083/
http://dx.doi.org/10.1063/1.3160181
_version_ 1643646113029292032
score 13.159267

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