Deposition of ZnO-Al (AZO) thin films for optical properties
Zinc Oxide (ZnO) is an inorganic compound and it is doped with aluminum to increase its capabilities. Aluminum Zinc Oxide (AZO) thin films are semiconductor materials that have band gap energy of 3.3eV. Various method of deposition have been study to growth AZO thin films. It has been extensively...
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Main Authors: | , , , , , |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2021
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Subjects: | |
Online Access: | http://eprints.uthm.edu.my/2796/1/P12713_9c6d533035b070a3183aee92d4af5889.pdf http://eprints.uthm.edu.my/2796/ https://doi.org/10.1063/5.0044520 |
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