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Experimental quantification of electrostatic damage (ESD) in binary reticle with feature of nanometre scale gaps

A Binary reticle for lithography circuit patterning is extremerly senstive to electrostatic field. Damaged is seen on its feature after a breakdown voltage occurred between the metal lines. The experimental quantification of ESD for Binary reticle is performed by direct discharge to the feature of C...

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Main Authors: Razman, Harriman, Awang Md Isa, Azmi, Suaidi, Mohamad Kadim
Format: Article
Language:English
Published: Wydawnictwo SIGMA-NOT 2022
Online Access:http://eprints.utem.edu.my/id/eprint/26215/2/ARTICLE%20PUBLISHED%20EXPERIMENTAL%20QUANTIFICATION%20OF%20ESD%20IN%20BINARY%20RETICLE.PDF
http://eprints.utem.edu.my/id/eprint/26215/
http://pe.org.pl/articles/2022/3/14.pdf
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spelling my.utem.eprints.262152023-03-02T12:08:50Z http://eprints.utem.edu.my/id/eprint/26215/ Experimental quantification of electrostatic damage (ESD) in binary reticle with feature of nanometre scale gaps Razman, Harriman Awang Md Isa, Azmi Suaidi, Mohamad Kadim A Binary reticle for lithography circuit patterning is extremerly senstive to electrostatic field. Damaged is seen on its feature after a breakdown voltage occurred between the metal lines. The experimental quantification of ESD for Binary reticle is performed by direct discharge to the feature of Critical Dimension (CD) of 80 nm to 160 nm. Its breakdown voltage correlated to CD but lower than international standard recommendations and observed Electric Field-Induced Migration (EFM) damaged at CD of < 110 nm but ESD for CD > 110 nm to 160 nm. Wydawnictwo SIGMA-NOT 2022 Article PeerReviewed text en http://eprints.utem.edu.my/id/eprint/26215/2/ARTICLE%20PUBLISHED%20EXPERIMENTAL%20QUANTIFICATION%20OF%20ESD%20IN%20BINARY%20RETICLE.PDF Razman, Harriman and Awang Md Isa, Azmi and Suaidi, Mohamad Kadim (2022) Experimental quantification of electrostatic damage (ESD) in binary reticle with feature of nanometre scale gaps. Przeglad Elektrotechniczny, 98 (3). 60 - 63. ISSN 0033-2097 http://pe.org.pl/articles/2022/3/14.pdf 10.15199/48.2022.03.14
institution Universiti Teknikal Malaysia Melaka
building UTEM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknikal Malaysia Melaka
content_source UTEM Institutional Repository
url_provider http://eprints.utem.edu.my/
language English
description A Binary reticle for lithography circuit patterning is extremerly senstive to electrostatic field. Damaged is seen on its feature after a breakdown voltage occurred between the metal lines. The experimental quantification of ESD for Binary reticle is performed by direct discharge to the feature of Critical Dimension (CD) of 80 nm to 160 nm. Its breakdown voltage correlated to CD but lower than international standard recommendations and observed Electric Field-Induced Migration (EFM) damaged at CD of < 110 nm but ESD for CD > 110 nm to 160 nm.
format Article
author Razman, Harriman
Awang Md Isa, Azmi
Suaidi, Mohamad Kadim
spellingShingle Razman, Harriman
Awang Md Isa, Azmi
Suaidi, Mohamad Kadim
Experimental quantification of electrostatic damage (ESD) in binary reticle with feature of nanometre scale gaps
author_facet Razman, Harriman
Awang Md Isa, Azmi
Suaidi, Mohamad Kadim
author_sort Razman, Harriman
title Experimental quantification of electrostatic damage (ESD) in binary reticle with feature of nanometre scale gaps
title_short Experimental quantification of electrostatic damage (ESD) in binary reticle with feature of nanometre scale gaps
title_full Experimental quantification of electrostatic damage (ESD) in binary reticle with feature of nanometre scale gaps
title_fullStr Experimental quantification of electrostatic damage (ESD) in binary reticle with feature of nanometre scale gaps
title_full_unstemmed Experimental quantification of electrostatic damage (ESD) in binary reticle with feature of nanometre scale gaps
title_sort experimental quantification of electrostatic damage (esd) in binary reticle with feature of nanometre scale gaps
publisher Wydawnictwo SIGMA-NOT
publishDate 2022
url http://eprints.utem.edu.my/id/eprint/26215/2/ARTICLE%20PUBLISHED%20EXPERIMENTAL%20QUANTIFICATION%20OF%20ESD%20IN%20BINARY%20RETICLE.PDF
http://eprints.utem.edu.my/id/eprint/26215/
http://pe.org.pl/articles/2022/3/14.pdf
_version_ 1759693056670433280
score 13.19449

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