Scalable Fabrication Of Nickel Micropillars Using Ultra-Violet Photolithography Process For Microelectronics Application

In the world of semiconductors and microelectronics, a trend to vertically stack integrated circuits are highly been used as it can meet the electronic device requirements. This stacking system technology can perform better performance, increase the functionality, reduce power consumption and also r...

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Bibliographic Details
Main Author: Taufik, Rais Ahmad
Format: Monograph
Language:English
Published: Universiti Sains Malaysia 2019
Subjects:
Online Access:http://eprints.usm.my/58464/1/Scalable%20Fabrication%20Of%20Nickel%20Micropillars%20Using%20Ultra-Violet%20Photolithography%20Process%20For%20Microelectronics%20Application.pdf
http://eprints.usm.my/58464/
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