Scalable Fabrication Of Nickel Micropillars Using Ultra-Violet Photolithography Process For Microelectronics Application

• Main Author: Taufik, Rais Ahmad
• Format: Monograph
• Language: English
• Published: Universiti Sains Malaysia 2019
• Subjects: T Technology; TJ Mechanical engineering and machinery
• Online Access: http://eprints.usm.my/58464/1/Scalable%20Fabrication%20Of%20Nickel%20Micropillars%20Using%20Ultra-Violet%20Photolithography%20Process%20For%20Microelectronics%20Application.pdf; http://eprints.usm.my/58464/

In the world of semiconductors and microelectronics, a trend to vertically stack integrated circuits are highly been used as it can meet the electronic device requirements. This stacking system technology can perform better performance, increase the functionality, reduce power consumption and also r...