Effect of focused ion beam process parameter on Tin-Nickel-Copper micropillars microfabrication

• Main Authors: Annuar, N. Syahira M., Mahmoodian, Reza, Abd Shukor, Mohd Hamdi
• Format: Article
• Published: Taylor & Francis 2020
• Subjects: T Technology (General); TJ Mechanical engineering and machinery
• Online Access: http://eprints.um.edu.my/36958/

In this work, the mechanism of focused ion beam (FIB) milling as an advanced manufacturing technique is studied to pattern micropillars at different diameter sizes of 5, 10 and 20 mu m. Under the same type of ion source which is Ga ion, the main ion beam parameters that influenced the FIB machining...