Characterization And Behaviour Of Silicon Dioxide Nanoparticles In Chemical Mechanical Polishing Wastewater With The Presence Of Ferrous Sulphate And Polyaluminium Chloride

• المؤلف الرئيسي: Sin, Jing Yao
• التنسيق: Monograph
• اللغة: English
• منشور في: Universiti Sains Malaysia 2017
• الموضوعات: T Technology; TA Engineering (General). Civil engineering (General)
• الوصول للمادة أونلاين: http://eprints.usm.my/51952/1/Characterization%20And%20Behaviour%20Of%20Silicon%20Dioxide%20Nanoparticles%20In%20Chemical%20Mechanical%20Polishing%20Wastewater%20With%20The%20Presence%20Of%20Ferrous%20Sulphate%20And%20Polyaluminium%20Chloride_Sin%20Jing%20Yao_A9_2017.pdf; http://eprints.usm.my/51952/

In the twenty-first century, semiconductor industry is one of the most competitive manufacturing industries around worldwide. This is due to high demand of semiconductor for the manufacturing of electronic devices in this high technology era. While there are many wafers and chips produced daily from...