Dedicated fixture design for polishing of silicon
Polishing of silicon is a major process seen in microelectronic and optical industries. As mirror-like surface finish is an essential factor that influences the performance of electronic and optical products, it has been believed that the fixture in finite element does play a role to produce such a...
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| Format: | Undergraduates Project Papers |
| Language: | English |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/300/1/23.Dedicated%20fixture%20design%20for%20polishing%20of%20silicon.pdf http://umpir.ump.edu.my/id/eprint/300/ |
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