Growth And Characterization Of AlGaN Thin Films Via Sol-gel Spin Coating Method

In this study, the growth and characterization of aluminum gallium nitride (AlGaN) thin film grown on AlN/Si(Ill) template via sol-gel spin coating method were reported. The structural, morphological and optical properties of AlGaN thin film were compared with GaN thin film which prepared using the...

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Bibliographic Details
Main Authors: Isa, Nurul Atikah Mohd, Sha, Shiong Ng, Hassan, Zainuriah
Format: Conference or Workshop Item
Language:English
Published: 2016
Subjects:
Online Access:http://eprints.usm.my/48788/1/NG9.pdf%20done.pdf
http://eprints.usm.my/48788/
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