Fabrication And Characterizations Of Magnetron Co-Sputtered InAIN Films For Photodetectors Application
In this work, growth of indium aluminum nitride (InAlN) film was studied on different substrates by using reactive magnetron co-sputtering technique. The study was mainly focused to grow In-rich InAlN film on p-type Si (111) substrate with improved physical properties. The structural properties of I...
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| Format: | Thesis |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | http://eprints.usm.my/45432/1/NAVEED%20AFZAL.pdf http://eprints.usm.my/45432/ |
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