Fabrication and characterization of micro fluidic based fiber optic refractive index sensor

• Main Authors: Hamid, I.S.L. Abdul, Kamil, Y. Mustapha, Manaf, A. Abd, Mahdi, M.A.
• Format: Article
• Published: Elsevier 2017
• Subjects: TK1-9971 Electrical engineering. Electronics. Nuclear engineering
• Online Access: http://eprints.usm.my/39097/; http://dx.doi.org/10.1016/j.sbsr.2017.03.003

A refractive index sensorwas proposed by using 3 dimension (3D) grayscale lithography technique. Optical fiber with taper diameter of 12 μm was embedded in a closed microfluidic channel. Taper area of optical fiber is in floating condition at the center of micro channel. Grayscale variation range used for this sensor was 70%–74% and thickness variation 430 μm–694 μm was achieved. The dimension of the sensor was 7.5 cm in length and 2 cm in width. Fabricated sensor was characterized with air condition and solution concentration from 0.1 M to 1 M. A sensitivity of 1457 nm/RIU is achieved. The measured results show a good repeatability and low temperature cross-sensitivity.