Fabrication and characterization of micro fluidic based fiber optic refractive index sensor
A refractive index sensorwas proposed by using 3 dimension (3D) grayscale lithography technique. Optical fiber with taper diameter of 12 μm was embedded in a closed microfluidic channel. Taper area of optical fiber is in floating condition at the center of micro channel. Grayscale variation range...
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Main Authors: | , , , |
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Format: | Article |
Published: |
Elsevier
2017
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Subjects: | |
Online Access: | http://eprints.usm.my/39097/ http://dx.doi.org/10.1016/j.sbsr.2017.03.003 |
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Summary: | A refractive index sensorwas proposed by using 3 dimension (3D) grayscale lithography technique. Optical fiber
with taper diameter of 12 μm was embedded in a closed microfluidic channel. Taper area of optical fiber is in
floating condition at the center of micro channel. Grayscale variation range used for this sensor was 70%–74%
and thickness variation 430 μm–694 μm was achieved. The dimension of the sensor was 7.5 cm in length and
2 cm in width. Fabricated sensor was characterized with air condition and solution concentration from 0.1 M
to 1 M. A sensitivity of 1457 nm/RIU is achieved. The measured results show a good repeatability and low temperature cross-sensitivity. |
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