Brief: fabrication processes of silicon-on-insulator and Lateral bipolar transistors

• Main Authors: S Hamad, Osama, Sidek, Othman, Rehman, Mahfoozur, Ibrahim, Kamarulazizi, H.Mourad, Magdy
• Format: Conference or Workshop Item
• Language: English
• Published: 2008
• Subjects: TH1-9745 Building construction
• Online Access: http://eprints.usm.my/34464/1/HBP20.pdf; http://eprints.usm.my/34464/

Silicon on Insulator (SOI) has long been the forerunner of the CMOS technology in the last decade offering superior CMOS with higher speed, higher density, and excellent radiation hardness and reduced second order effects for submicron VLSI applications. The traditional SOI structure consists of...