Effects of ammonia-ambient annealing on physical and electrical characteristics of rare earth CeO2 as passivation film on silicon

• Main Authors: Hock, Jin Quah, Hassan, Zainuriah, Fong, Kwong Yam, Ahmed, Naser Mahmoud, Mohd Salleh, Mohammad Amran, Matori, Khamirul Amin, Lim, Way Foong
• Format: Article
• Language: English
• Published: Elsevier 2017
• Online Access: http://psasir.upm.edu.my/id/eprint/54614/1/Effects%20of%20ammonia-ambient%20annealing%20on%20physical%20and%20electrical%20characteristics%20of%20rare%20earth%20CeO2%20as%20passivation%20film%20on%20silicon.pdf; http://psasir.upm.edu.my/id/eprint/54614/; https://www.sciencedirect.com/science/article/pii/S0925838816338233

Effects of post-deposition annealing at 400–1000 °C in ammonia (NH3) gas ambient towards physical and electrical characteristics of metal-organic decomposition derived CeO2 films spin-coated on n-type Si substrates were studied. The use of NH3 annealing as N and H sources has promoted nitridation an...