Effects of ammonia-ambient annealing on physical and electrical characteristics of rare earth CeO2 as passivation film on silicon
Effects of post-deposition annealing at 400–1000 °C in ammonia (NH3) gas ambient towards physical and electrical characteristics of metal-organic decomposition derived CeO2 films spin-coated on n-type Si substrates were studied. The use of NH3 annealing as N and H sources has promoted nitridation an...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2017
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| Online Access: | http://psasir.upm.edu.my/id/eprint/54614/1/Effects%20of%20ammonia-ambient%20annealing%20on%20physical%20and%20electrical%20characteristics%20of%20rare%20earth%20CeO2%20as%20passivation%20film%20on%20silicon.pdf http://psasir.upm.edu.my/id/eprint/54614/ https://www.sciencedirect.com/science/article/pii/S0925838816338233 |
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