Micromachined W-band integrated rectangular waveguide filter utilising SU-8
This paper is a study on the design of microwave waveguide filter suitable for micromachining process. Novel structure and processes are introduced which allow accurate fabrication of low loss waveguide filter. This new technique applies micro-fabrication processes to improve fabrication accuracy. A...
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| Main Authors: | , , , , , |
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| 格式: | Conference or Workshop Item |
| 语言: | English |
| 出版: |
IEEE
2007
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| 在线阅读: | http://psasir.upm.edu.my/id/eprint/47684/1/Micromachined%20W-band%20integrated%20rectangular%20waveguide%20filter%20utilising%20SU-8.pdf http://psasir.upm.edu.my/id/eprint/47684/ |
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