The study of the good polishing method for polymer SU-8 waveguide

• Main Authors: Mohammad Syuhaimi, Ab-Rahman, Fazlinda, Ab-Aziz, Noor Azie Azura, Mohd Arif, Saiful Dzulkefly, Zan, Seri Mastura, Mustaza, Abang Annuar, Ehsan, Sahbudin, Shaari
• Format: Article
• Language: English
• Published: Optica Applicata 2009
• Subjects: T Technology (General); TA Engineering (General). Civil engineering (General); TP Chemical technology
• Online Access: http://ir.unimas.my/id/eprint/738/1/The%20study%20of%20the%20good%20polishing%20method%20for%20polymer%20SU-8%28abstract%29.pdf; http://ir.unimas.my/id/eprint/738/; http://www.if.pwr.wroc.pl/~optappl/article.php?lp=706

This research focused on polish characteristic of polymer based waveguides. The aim of the research was to show how polishing parameters affect the cut length of the end surface of SU-8 polymer on silicon and to detemine the best parameters for polishing SU-8 polymer. Then, four samples were used fo...