Micromachined W-band integrated rectangular waveguide filter utilising SU-8

• Main Authors: Ismail, Alyani, Razalli, Mohammad Shahrazel, Mahdi, Mohd Adzir, Wan Darman, Wan Nurul Izza, Raja Abdullah, Raja Syamsul Azmir, Mohd Isa, Maryam
• Format: Conference or Workshop Item
• Language: English
• Published: IEEE 2007
• Online Access: http://psasir.upm.edu.my/id/eprint/47684/1/Micromachined%20W-band%20integrated%20rectangular%20waveguide%20filter%20utilising%20SU-8.pdf; http://psasir.upm.edu.my/id/eprint/47684/

This paper is a study on the design of microwave waveguide filter suitable for micromachining process. Novel structure and processes are introduced which allow accurate fabrication of low loss waveguide filter. This new technique applies micro-fabrication processes to improve fabrication accuracy. A...