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A comprehensive study on RF MEMS switch

This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, ins...

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Main Authors: Jaafar, Haslina, Beh, Kean Sheng, Md Yunus, Nurul Amziah, Wan Hasan, Wan Zuha, Shafie, Suhaidi, Sidek, Othman
Format: Article
Language:English
Published: Springer 2014
Online Access:http://psasir.upm.edu.my/id/eprint/36147/1/A%20comprehensive%20study%20on%20RF%20MEMS%20switch.pdf
http://psasir.upm.edu.my/id/eprint/36147/
http://link.springer.com/article/10.1007%2Fs00542-014-2276-7
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spelling my.upm.eprints.361472015-12-18T05:30:22Z http://psasir.upm.edu.my/id/eprint/36147/ A comprehensive study on RF MEMS switch Jaafar, Haslina Beh, Kean Sheng Md Yunus, Nurul Amziah Wan Hasan, Wan Zuha Shafie, Suhaidi Sidek, Othman This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and discussed. Springer 2014 Article PeerReviewed application/pdf en http://psasir.upm.edu.my/id/eprint/36147/1/A%20comprehensive%20study%20on%20RF%20MEMS%20switch.pdf Jaafar, Haslina and Beh, Kean Sheng and Md Yunus, Nurul Amziah and Wan Hasan, Wan Zuha and Shafie, Suhaidi and Sidek, Othman (2014) A comprehensive study on RF MEMS switch. Microsystem Technologies, 20 (12). pp. 2109-2121. ISSN 0946-7076; ESSN: 1432-1858 http://link.springer.com/article/10.1007%2Fs00542-014-2276-7 10.1007/s00542-014-2276-7
institution Universiti Putra Malaysia
building UPM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Putra Malaysia
content_source UPM Institutional Repository
url_provider http://psasir.upm.edu.my/
language English
description This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and discussed.
format Article
author Jaafar, Haslina
Beh, Kean Sheng
Md Yunus, Nurul Amziah
Wan Hasan, Wan Zuha
Shafie, Suhaidi
Sidek, Othman
spellingShingle Jaafar, Haslina
Beh, Kean Sheng
Md Yunus, Nurul Amziah
Wan Hasan, Wan Zuha
Shafie, Suhaidi
Sidek, Othman
A comprehensive study on RF MEMS switch
author_facet Jaafar, Haslina
Beh, Kean Sheng
Md Yunus, Nurul Amziah
Wan Hasan, Wan Zuha
Shafie, Suhaidi
Sidek, Othman
author_sort Jaafar, Haslina
title A comprehensive study on RF MEMS switch
title_short A comprehensive study on RF MEMS switch
title_full A comprehensive study on RF MEMS switch
title_fullStr A comprehensive study on RF MEMS switch
title_full_unstemmed A comprehensive study on RF MEMS switch
title_sort comprehensive study on rf mems switch
publisher Springer
publishDate 2014
url http://psasir.upm.edu.my/id/eprint/36147/1/A%20comprehensive%20study%20on%20RF%20MEMS%20switch.pdf
http://psasir.upm.edu.my/id/eprint/36147/
http://link.springer.com/article/10.1007%2Fs00542-014-2276-7
_version_ 1643831662886256640
score 13.211869

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