A comprehensive study on RF MEMS switch

This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, ins...

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Bibliographic Details
Main Authors: Jaafar, Haslina, Beh, Kean Sheng, Md Yunus, Nurul Amziah, Wan Hasan, Wan Zuha, Shafie, Suhaidi, Sidek, Othman
Format: Article
Language:English
Published: Springer 2014
Online Access:http://psasir.upm.edu.my/id/eprint/36147/1/A%20comprehensive%20study%20on%20RF%20MEMS%20switch.pdf
http://psasir.upm.edu.my/id/eprint/36147/
http://link.springer.com/article/10.1007%2Fs00542-014-2276-7
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Summary:This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and discussed.