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High-isolation and low-loss RF MEMS shunt switches

This paper presents the design and simulation of a radio frequency (RF) microelectromechanical system (MEMS) shunt switch using a three-dimensional RF simulator, Em3ds10 (2008 version) software for the frequency range of 1-40 GHz. The shunt capacitive switch is electrostatic actuated and designed wi...

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Main Authors: Jaafar, Haslina, Sidek, Othman, Miskam, Muhamad Azman, Abdul Rahman, Muhammad Razi
Format: Article
Language:English
Published: Applied Computational Electromagnetics Society 2010
Online Access:http://psasir.upm.edu.my/id/eprint/15009/1/High-isolation%20and%20low-loss%20RF%20MEMS%20shunt%20switches.pdf
http://psasir.upm.edu.my/id/eprint/15009/
http://www.aces-society.org/search.php?vol=25&no=9&type=2
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spelling my.upm.eprints.150092019-05-08T07:49:38Z http://psasir.upm.edu.my/id/eprint/15009/ High-isolation and low-loss RF MEMS shunt switches Jaafar, Haslina Sidek, Othman Miskam, Muhamad Azman Abdul Rahman, Muhammad Razi This paper presents the design and simulation of a radio frequency (RF) microelectromechanical system (MEMS) shunt switch using a three-dimensional RF simulator, Em3ds10 (2008 version) software for the frequency range of 1-40 GHz. The shunt capacitive switch is electrostatic actuated and designed with a meander beam support to lower the pull-in voltage. Fast simulations of complex structures based on a method-of-moment approach allow for optimal design of MEMS switch. The switch has a simulated pull-in voltage of 2.5 V and the RF performances of insertion loss and isolation are less than -0.2 dB and -50 dB at 12 GHz, respectively. Applied Computational Electromagnetics Society 2010 Article PeerReviewed text en http://psasir.upm.edu.my/id/eprint/15009/1/High-isolation%20and%20low-loss%20RF%20MEMS%20shunt%20switches.pdf Jaafar, Haslina and Sidek, Othman and Miskam, Muhamad Azman and Abdul Rahman, Muhammad Razi (2010) High-isolation and low-loss RF MEMS shunt switches. Applied Computational Electromagnetics Society Journal, 25 (9). pp. 780-786. ISSN 1054-4887 http://www.aces-society.org/search.php?vol=25&no=9&type=2
institution Universiti Putra Malaysia
building UPM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Putra Malaysia
content_source UPM Institutional Repository
url_provider http://psasir.upm.edu.my/
language English
description This paper presents the design and simulation of a radio frequency (RF) microelectromechanical system (MEMS) shunt switch using a three-dimensional RF simulator, Em3ds10 (2008 version) software for the frequency range of 1-40 GHz. The shunt capacitive switch is electrostatic actuated and designed with a meander beam support to lower the pull-in voltage. Fast simulations of complex structures based on a method-of-moment approach allow for optimal design of MEMS switch. The switch has a simulated pull-in voltage of 2.5 V and the RF performances of insertion loss and isolation are less than -0.2 dB and -50 dB at 12 GHz, respectively.
format Article
author Jaafar, Haslina
Sidek, Othman
Miskam, Muhamad Azman
Abdul Rahman, Muhammad Razi
spellingShingle Jaafar, Haslina
Sidek, Othman
Miskam, Muhamad Azman
Abdul Rahman, Muhammad Razi
High-isolation and low-loss RF MEMS shunt switches
author_facet Jaafar, Haslina
Sidek, Othman
Miskam, Muhamad Azman
Abdul Rahman, Muhammad Razi
author_sort Jaafar, Haslina
title High-isolation and low-loss RF MEMS shunt switches
title_short High-isolation and low-loss RF MEMS shunt switches
title_full High-isolation and low-loss RF MEMS shunt switches
title_fullStr High-isolation and low-loss RF MEMS shunt switches
title_full_unstemmed High-isolation and low-loss RF MEMS shunt switches
title_sort high-isolation and low-loss rf mems shunt switches
publisher Applied Computational Electromagnetics Society
publishDate 2010
url http://psasir.upm.edu.my/id/eprint/15009/1/High-isolation%20and%20low-loss%20RF%20MEMS%20shunt%20switches.pdf
http://psasir.upm.edu.my/id/eprint/15009/
http://www.aces-society.org/search.php?vol=25&no=9&type=2
_version_ 1643825804983926784
score 13.211869

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